Fabrication and characterization of coplanar waveguides on silicon using a combination of SiO2 and SRO20

In this work, the use of silicon rich oxide (SRO) and chemical vapor deposition SiO2 double layers as passivation films of coplanar waveguides (CPW) on high resistivity silicon (HR-Si) with an N+ backside is studied. The microwave performance of the fabricated CPWs is evaluated by computing the atte...

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Bibliographic Details
Main Authors: REBECA LEAL ROMERO, IGNACIO ENRIQUE ZALDIVAR HUERTA, MARIA DEL CARMEN MAYA SANCHEZ, MARIANO ACEVES MIJARES, J. APOLINAR REYNOSO HERNANDEZ
Format: info:eu-repo/semantics/article
Language:eng
Published: IEEE 2008
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Online Access:http://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1111

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