Study by AES of the titanium nitruration in the growing of TiN thin films by PLD technique

A series of different TiNx thin films were grown by PLD. The purpose for this work was to study through the AES interpretation, how the different conditions of the partial pressure of N inside the chamber during the growing of these thin films, affects the stoichiometry of the TiNx deposited. The re...

Full description

Saved in:
Bibliographic Details
Main Author: JOSE ALBERTO DUARTE MOLLER
Format: info:eu-repo/semantics/article
Language:eng
Published: 2006
Subjects:
Online Access:http://cimav.repositorioinstitucional.mx/jspui/handle/1004/965

CIC - Centro de Información y Conocimiento Johannes Gutenberg ®