Effects of air cavity in dynamic pressure sensors: Experimental validation

© 2020 by the authors. Licensee MDPI, Basel, Switzerland. T. An air-backed diaphragm is the key structure of most dynamic pressure sensors and plays a critical role in determining the sensor performance. Our previous analytical model investigated the influence of air cavity length on the sensitivity...

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Bibliographic Details
Main Authors: Dong, Q, Song, X, Liu, H, Liu, Haijun|0000-0002-2320-1425
Format: Journal Article
Language:English
Published: 2020
Subjects:
Online Access:http://hdl.handle.net/20.500.12613/4495
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